Nanometer-Scale Manipulation and Ultrasonic Cutting Using an Atomic Force Microscope Controlled by a Haptic Device as a Human Interface

概要

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We describe a nanometer-scale manipulation and cutting method using ultrasonic oscillation scratching. The system is based on a modified atomic force microscope (AFM) coupled with a haptic device as a human interface. By handling the haptic device, the operator can directly move the AFM probe to manipulate nanometer scale objects and cut a surface while feeling the reaction from the surface in his or her fingers. As for manipulation using the system, nanometer-scale spheres were controllably moved by feeling the sensation of the AFM probe touching the spheres. As for cutting performance, the samples were prepared on an AT-cut quartz crystal resonator (QCR) set on an AFM sample holder. The QCR oscillates at its resonance frequency (9 MHz) with an amplitude of a few nanometers. Thus it is possible to cut the sample surface smoothly by the interaction between the AFM probe and the oscillating surface, even when the samples are viscoelastics such as polymers and biological samples. The ultrasonic nano-manipulation and cutting system would be a very useful and effective tool in the fields of nanometer-scale engineering and biological sciences.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-07-25