顕微作業用XYθ小型自走機械の開発(第4報) : 補正手法の改良と補正実験

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In this paper, we describe improvement of compensation sequence and results of the motion compensation for the versatile micro robot. In order to provide microscopic operation, the unique locomotion mechanism which is composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged on cross each other are connected by four piezoelectric actuators so that it can move in any directions, i.e. in X and Y directions as well as rotate at the specified point precisely with the manner of an inchworm. Moreover the combination of particular wave forms of piezoelectric actuators can provide "arc trajectory motion with facing center", that is important for the micro manipulator to keep its tip end within the microscopic view area. In previous report, we have proposed the competitive compensation method supported by CCD camera based tracking system and confirmed the effectiveness from several experiments. However, we have also confirmed that we could not compensate straight motions in forward, back, right and left directions because of the assembling error of the four piezoelectric actuators and two electromagnets. In this report, we propose the unique mechanistic model which allows the assembling error to improve the compensation method. In the compensation experiments, we succeed in reducing the motion errors and confirm the effectiveness of newly developed compensation method. The design procedure, basic performance and biomedical application of this tiny robot are also discussed to open the new field for micro-robotics in precision region.
社団法人精密工学会の論文
2007-08-05

顕微作業用XYθ小型自走機械の開発(第4報) : 補正手法の改良と補正実験

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