顕微作業用XYθ小型自走機械の開発(第5報) : 圧電アクチュエーターの機能解析と速度向上

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In this paper, we describe the performance analysis of the piezoelectric actuator and results of the motion speed of the newly developed micro robot which can be applied for flexible positioning device as well as microscopic operation. In order to provide microscopic operation, the unique locomotion mechanism which is composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged on cross each other are connected by four piezoelectric actuators so that it can move in any directions, i.e. in X and Y directions as well as rotate at the specified point precisely with the manner of an inchworm. However, this robot takes a long time to move long distance because the maximum speed is only a few millimeters. For example, the robot takes over 30 seconds for 10 centimeters. In order to analyze the relationship between the motion speed and parameters of the piezoelectric actuator, we use the simple dynamical model. Then, we have selected the special piezoelectric actuator with amplification mechanism in order to improve the motion speed. In several experiments, we have checked that the robot equipped with the newly selected actuators becomes over 7 times faster than previous one. We have also discussed the influence of the mechanical distortion and the delay time of the electromagnet for more accurate approximation of the motion speed. The possibility of this tiny robot for flexible positioning device is also discussed to open the new field for micro-robotics in precision region.
社団法人精密工学会の論文
2007-10-05

顕微作業用XYθ小型自走機械の開発(第5報) : 圧電アクチュエーターの機能解析と速度向上

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