視覚を用いたマイクロ液滴塗布システムの構築

概要

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rights: 社団法人日本機械学会rights: 本文データは学協会の許諾に基づきCiNiiから複製したものであるrelation: IsVersionOf: http://ci.nii.ac.jp/naid/110002385062/An application technique for micro drops with diameter as small as 100 μm is desired for repairing the micro patterns of electronic circuits. In this paper we propose a micro drop application system that utilizes visual feedback control. A micro object handling robot, which is equipped with optical microscopes and a "task package", transfers micro drops one by one from the reservoir to the desired position on a substrate by means of a needle shaped tool, and applies them while controlling their diameter based on real time visual measurement. The experiment proved that the diameter of micro drops of metal paste can be controlled within an accuracy of 4%.
社団法人日本機械学会の論文
1997-05-25