β-ジケトン金属錯体を原料に用いたCVD法によるZrO_2-Y_2O_3系酸化物薄膜の合成

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Films in the system ZrO_2-Y_2O_3 were prepared at 600゜ to 1000℃ by chemical vapor deposition using β-diketone chelates of Zr and Y and O_2. The films having Y_2O_3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol% Y_2O_3 were composed of cubic and tetragonal phases. The films containing more than 3 mol% Y_2O_3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16Å with increasing Y_2O_3 content. The deposition rates of the cubic-phase films at 620゜ and 660℃ were 1.8 and 9.0 μm/h, respectively. The film deposited at 660℃ was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660℃. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.
社団法人日本セラミックス協会の論文
1993-03-01