ボールアーティファクトによる歯形測定精度の評価 : 国家標準にトレーサブルなボール中心間距離測定装置の開発

概要

論文の詳細を見る
Gear tooth with the highest accuracy is graded on the order of 0.1μm by ISO 1328-1, however gear measuring instruments have normally 1-2μm measurement uncertainty caused by moving components such as guide ways, rotary table, or electronic components, software and so on. These uncertainties of measurement are usually estimated by calibrated gear artifacts, though the best achievable uncertainty in gear measurements may be 20-30%. In view of this situation, AIST (National Institute of Advanced Industrial Science and Technology) has proposed a new calibration method using ball artifact consisting of two master balls (DBA). Difference of the distance between the arc of the master ball and involute curve can be calculated theoretically. For the calculation, center distance between two balls and ball radius are required and the value is very important and also should be traceable to national standard of length. This paper reports on a new method and an originally developed instrument to measure the center distance between two balls by using laser interferometer. The expanded uncertainty in measurement of a center distance of 44mm is 21nm.
公益社団法人精密工学会の論文
2005-10-05