レーザ干渉変位計によるインボリュート形状の精密測定法(第1報) : 測定装置と基礎特性評価

概要

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The vibration / noise of gears in production is one of the serious problems for e.g. vehicles and other machines. Characteristics of vibration / noise of gears are strongly influenced by tooth flank form deviation of sub-micron meter order. The quality of product gears is controlled by gear measuring machine and it is calibrated with involute artifact. However, the current calibration method of involute artifact can not achieve enough accuracy and its traceability is not guaranteed. In this report, the method to measure the involute artifact directly by laser interferometer is proposed. Following fundamental experiments are carried out and the influence of surface condition of target object to be measured, and the effect of driving system of artifact are investigated. The difference of measured profile forms is approximately 0.1μm when the measurement of artifact from tip to root is executed. It is confirmed that the proposed method has a potential to accomplish a highly precise measurement of involute artifact.
社団法人精密工学会の論文
2006-10-05