ステップゲージ校正用干渉式三次元測定機の開発

概要

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There are many kinds of geometrical gauges used for calibration of machine tools and coordinate measuring machines (CMMs). A step-gauge is a kind of calibration gauge. It consists of many short block-gauges. Block-gauges were directly calibrated by an interferometer using method of exact fraction. The method, however, does not apply to the calibration of step-gauges because of their complicated structure. The calibration works are very important missions in national metrology institutes (NMIs). We developed the step-gauge calibration system that consisted of a CMM and an interferometer. In this paper, we describe the performance of a CMM system combined with an interferometer for step-gauge calibration and the evaluation of the measurement uncertainty. The uncertainty in measurement using this system is about 1.0μm (k=2) for 1-meter measurement.
公益社団法人精密工学会の論文
2002-05-05