Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope

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概要

• 論文の詳細を見る

• This paper reports on the design and simulation of a novel MEMS based convective gyroscope which can independently detect three components of angular rate. The sensor was designed with standard bulk MEMS technology. The 3D jet flow was simulated in the confined space formed by MEMS compatible laminated-structures. The configuration of the sensor consists of a PZT diaphragm, caps, in-plane tungsten hotwires located on the surface of a 0.4mm-thick circular silicon frame with diameter of 10mm. The simulated scale factors of the sensor are SFz = 0.83 μV/o/s, SFx = SFy = 3.10 μV/o/s. In measurement application, the 3DOF gyro eliminates the sensor-to-sensor misalignment, and therefore provides accurate measurement with small cross-sensitivity. The sensor also has high shock resistance since no proof mass is used.

• 2008-05-01

著者

• SUGIYAMA Susumu

  Ritsumeikan University

• DAU Van

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• DINH Thien

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• DAO Dzung

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• Dau Van

  Ritsumeikan University Biwako-kusatsu Campus Noji Higashi

• Dao Dzung

  Ritsumeikan University

• Dao Dzung

  Ritsumeikan University Biwako-kusatsu Campus Noji Higashi

• Sugiyama Susumu

  Ritsumeikan University Biwako-kusatsu Campus Noji Higashi

• Sugiyama Susumu

  Faculty Of Science And Egineering Ritsumeikan University

• Dinh Thien

  Ritsumeikan University Biwako-kusatsu Campus Noji Higashi

• Thanh Dau

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• Xuan Dinh

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• Viet Dao

  Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi

• Sugiyama Susumu

  Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

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