Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor
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概要
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This paper presents the design, fabrication and characterization of a 3-DOF (3-degree of freedom) highly sensitive soft-contact tactile (SCT) sensor, which utilizes micro force moment sensing (MFMS) chip. The MFMS chip is working based on the piezoresistive effect in silicon. The MFMS chip has been packaged to produce 3-DOF SCT sensor, which has the contact part is made of silicone rubber. The sensor can independently detect three components of force (Fx, Fy, Fz) acting on the soft contact part of the sensor. The MFMS chip and the SCT sensor have been calibrated. The outputs were linear and the crosstalk was small.
- 2007-03-01
著者
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Dao Dzung
Ritsumeikan University
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Dao Dzung
Center For Promotion Of 21 Century Coe Program Ritsumeikan Univ.
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WANG Qiang
Department of Chemistry and Chemical Biology, Gunma University
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SUGIYAMA Susumu
Department of Micro System Technology, Faculty of Science and Engineering, Ritsumeikan University
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Wang Qiang
Department Of Microsystems Technology Ritsumeikan University
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Sugiyama Susumu
Department Of Micro System Technology Ritsumeikan University
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Sugiyama Susumu
Department Of Microsystems Technology Ritsumeikan University
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Wang Qiang
Department Of Anesthesiology Plastic Surgery Hospital Chinese Academy Of Medical Sciences And Peking
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