Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump

概要

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A piezoelectric-driven valveless micro jet pump with a novel channel structure has been designed and fabricated. The simple structure micro jet pump consists of a lead zirconate titanate (PZT) diaphragm and flow channels. The design of the flow channels focuses on a cross junction formed by the neck of the pump chamber and one outlet and two opposite inlet channels. This structure allows differences in fluidic resistance and fluidic momentum inside the channels during each pump vibration cycle. To confirm the pump operation, a prototype was fabricated using polymethyl methacrylate as a base plate and a conventional machining technique. Two types of pump with nozzle depths of 0.5 and 0.2 mm were prepared, and the depth effect on the flow rate was investigated. The pump chamber has an 11.8 mm diameter, a 0.5 mm depth, and a volume of 0.055 cm3. The maximum flow rate of 17 ml/min at 400 Pa was obtained when the pump was driven at a resonant frequency of approximately 6 kHz by a sinusoidal voltage of 30 Vp–p.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-11-25