A Point Mass Circular Movement Gyroscope
スポンサーリンク
概要
著者
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SUGIYAMA Susumu
Ritsumeikan University
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Sugiyama S
Ritsumeikan Univ.
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Sugiyama Susumu
Faculty Of Science And Egineering Ritsumeikan University
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NAKAMURA Noriyuki
Ritsumeikan University
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CHIGIRA Tatsuo
Canon Inc.
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SUGIMORI Masami
Canon Inc.
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YAMAMOTO Hiroshi
Canon Inc.
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Sugiyama S
Brother Industries Ltd.
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Sugiyama Susumu
Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
関連論文
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- A Micromachined Thermal Flow Sensor Applied to A PC Mouse Device
- Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope
- Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure
- Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process
- Development of a Flexible Thermopile Power Generator Utilizing BiTe-Cu Thin Films
- Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light
- Fabrication of Sub-Micron Structures with High Aspect Ratio for Practical MEMS (特集:立体的微細加工)
- Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators for Micro Conveyer Systems
- 特集論文 Inelastic Constitutive Relationship of Electroplated Nickel Films at Elevated Temperatures for Design of Micro Connector (特集:MEMS/NEMS材料特性および信頼性評価)
- Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring
- A Point Mass Circular Movement Gyroscope
- Development of a 3-DOF Micro Accelerometer with Wireless Readout
- Optimization of PZT Diaphragm Pump for the Convective Gyroscope
- A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor
- Fabrication of Diaphragm Actuator using Bulk PZT
- Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding
- Development of Plastic Injection Molding Using the LIGA Process
- Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist
- Piezoresistive Force Sensor Utilizing Combination of Three-Axis Stress Components
- Mirror Deformation by Piezoelectric Actuators
- Characteristics of Polycrystalline Si Nano Wire Piezoresistors
- Design of Micro Multi-Axis Force-Moment Sensor
- Self-standing Polysilicon-metal Thermopile for Micro Power Generator
- A Study on the Sub-Micron LIGA Process
- Simulation for Submicron 3D-Structures based on Plane-pattern to the Cross-section Transfer (PCT) Technique
- X-ray Mask with SiC Membrane for LIGA Process
- Shape Prediction of 3-D Microstructures Fabricated by PCT Technique and Synchrotron Radiation Lithography
- Development and Characterization of a Small Ring-Shaped Ultrasonic Probe for Biopsies
- Electrochemical Selective Detection of Uric Acid Using a Copper-modified Carbon Electrode
- Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity
- Shape-prediction of 3D PTFE Microstructures Fabricated by Synchrotron Radiation Ablation
- Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity
- First-Principles Simulation on Piezoresistivity in Alpha and Beta Silicon Carbide Nanosheets
- First-Principles Simulation on Orientation Dependence of Piezoresistance Properties in Silicon Nanowires
- Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump
- Bonding of Lead Zirconate Titanate Ceramics to Si Single Crystals for Microdevices
- Fabrication of Microdevices Using Bulk Ceramics of Lead Zirconate Titanate
- First-Principles Simulation on Thickness Dependence of Piezoresistance Effect in Silicon Nanosheets