Fabrication of Diaphragm Actuator using Bulk PZT
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概要
- 論文の詳細を見る
Actuators that have a large driving force are necessary for use in micropumps and microvalves. These are produced by using PZT bulk ceramics having excellent piezoelectric properties together with Si single crystal. A novel fabrication process was proposed for bulk PZT microactuators. This process was composed with bonding a bulk PZT to a Si wafer, thinning the PZT down to several ten microns in thickness after bonding, micromachining of the thin PZT by an excimer laser, and Si micromachining such as reactive ion etching and anisotropic wet etching. A PZT-Si diaphragm structure was fabricated by this process, and successful operation of the diaphragm actuator was demonstrated.
- 社団法人 電気学会の論文
- 2006-07-01
著者
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Sugiyama Susumu
Faculty Of Science And Engineering Ritsumeikan University
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Sugiyama Susumu
Faculty Of Science And Egineering Ritsumeikan University
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KONISHI Takahiro
Faculty of Science and Engineering, Ritsumeikan University
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IDE Masato
Faculty of Science and Engineering, Ritsumeikan University
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TANAKA Katsuhiko
Faculty of Science and Engineering, Ritsumeikan University
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Ide Masato
Faculty Of Science And Engineering Ritsumeikan University
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Konishi Takahiro
Faculty Of Science And Engineering Ritsumeikan University
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Tanaka Katsuhiko
Faculty Of Engineering Science Osaka University:(present Address) Murata Manufacturing Co. Ltd.
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Tanaka Katsuhiko
Faculty Of Science And Engineering Ritsumeikan University
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