Mirror Deformation by Piezoelectric Actuators
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概要
- 論文の詳細を見る
Recently, MEMS devices are being studied for which the focus can be changed by moving a lens. Therefore, we propose a MEMS-based varifocal mirror in which piezoelectric actuators are used. In this study, we used micromachining to fabricate a varifocal mirror by bonding bulk PZT to Si single crystals, and then evaluated its performance.
- 社団法人 電気学会の論文
- 2006-07-01
著者
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Sugiyama Susumu
Faculty Of Science And Engineering Ritsumeikan University
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Sugiyama Susumu
Faculty Of Science And Egineering Ritsumeikan University
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TANAKA Katsuhiko
Faculty of Science and Engineering, Ritsumeikan University
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ISHII Akira
Faculty of Engineering, Kagawa University
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TANAKA Fuminori
R&D Engineering Department, Funai Electric Co., Ltd.
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MAEDA Shigeo
R&D Engineering Department, Funai Electric Co., Ltd.
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NAGASHIMA Kenji
R&D Engineering Department, Funai Electric Co., Ltd.
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TSUCHIYA Yoshiki
Faculty of Science and Engineering, Ritsumeikan University
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Maeda Shigeo
R&d Engineering Department Funai Electric Co. Ltd.
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Tanaka Fuminori
R&d Engineering Department Funai Electric Co. Ltd.
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Tsuchiya Yoshiki
Faculty Of Science And Engineering Ritsumeikan University
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Nagashima Kenji
R&d Engineering Department Funai Electric Co. Ltd.
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Tanaka Katsuhiko
Faculty Of Engineering Science Osaka University:(present Address) Murata Manufacturing Co. Ltd.
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Ishii Akira
Faculty Of Science And Engineering Ritsumeikan University
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Ishii Akira
Faculty Of Engineering Kagawa University
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