A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor
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概要
- 論文の詳細を見る
This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes a novel structure of the sensing element which can reduce 93% of thermal-induced stress. Moreover, the thermistors are made from low-doped p-type silicon, which has the TCR higher than that of metals and poly-silicon convective accelerometer. By using numerical method, the chip dimensions and the package size are optimized. The sensitivity of the sensor was simulated; other characteristics such as frequency response, shock resistance, noise problem are also deeply investigated. The sensor has been fabricated by MEMS process and characterized by experiments.
- 社団法人 電気学会の論文
- 2006-05-01
著者
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SUGIYAMA Susumu
Ritsumeikan University
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DINH Thien
Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi
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DAO Dzung
Ritsumeikan University, Biwako-Kusatsu Campus Noji Higashi
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Dao Dzung
Ritsumeikan University
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Dao Dzung
Ritsumeikan University Biwako-kusatsu Campus Noji Higashi
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Sugiyama Susumu
Ritsumeikan University Biwako-kusatsu Campus Noji Higashi
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Sugiyama Susumu
Faculty Of Science And Egineering Ritsumeikan University
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VAN DAU
Ritsumeikan University
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HAYASHIDA Masahiro
Ritsumeikan University
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Dinh Thien
Ritsumeikan University Biwako-kusatsu Campus Noji Higashi
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Sugiyama Susumu
Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
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