Bonding of Lead Zirconate Titanate Ceramics to Si Single Crystals for Microdevices
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-30
著者
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Sugiyama Susumu
Faculty Of Science And Engineering Ritsumeikan University
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KONISHI Takahiro
Faculty of Science and Engineering, Ritsumeikan University
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TANAKA Katsuhiko
Faculty of Science and Engineering, Ritsumeikan University
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KUZE Wataru
Faculty of Science and Engineering, Ritsumeikan University
関連論文
- Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light
- Fabrication of Diaphragm Actuator using Bulk PZT
- Bonding of Lead Zirconate Titanate Ceramics to Si Single Crystals for Microdevices
- Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding
- Epitaxial Growth of PLZT Single Crystal Film on SrTiO_3 by RF Sputtering
- An Enhancement of Photochromic Effect by Multi-Reflection Scattering in Fe-Doped PLZT
- Ferroelectric PLZT Thin Films Fabricated by RF Sputtering
- Mirror Deformation by Piezoelectric Actuators
- Simulation for Submicron 3D-Structures based on Plane-pattern to the Cross-section Transfer (PCT) Technique