Optimization of PZT Diaphragm Pump for the Convective Gyroscope

概要

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In this paper, we present the optimization of the PZT diaphragm pump for application in gas gyroscope. A circular flow inside the sealed case is simulated in detail by utilizing 3D compressible flow with the interaction of fluid-solid phase and the transient analysis is employed. The working principle and the effect of the jet-pump integrated inside the sensor are explained and validated by experiments using anemometry technique. The results verified that configuration of the pump is optimized and the peak velocity of the flow at the sensing element is 3.5m/sec after starting the pump 3.6ms. A novel structure of the sensing element of the gas gyroscope, consists of thermistor and heater, is also reported. The thermistor is heated by a separate heater, whose power is supplied independently form that of thermistor. This design allows low voltage on the thermistor, therefore the noise is reduced. Both heater and thermistor are optimized in order to reduce the thermal induced stress which occurred in the old thermistors at working temperatures. The thermal stress appeared in p-type silicon thermistors reduced the performance of sensor by 7.5%, which is calculated and experimentally confirmed.
社団法人電気学会の論文
2007-07-01