Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring
スポンサーリンク
概要
- 論文の詳細を見る
This paper present design, fabrication and characterization of a miniaturized single crystal cantilever type 1-axis MEMS accelerometer with piezoresistive sensing elements utilizing bulk micromachining techniques. It has overall dimensions of 950um×850um×450um, length width and thickness, respectively. This accelerometer is being introduced for a wearable sensing system for real-time activity monitoring. Possible cases of experiments have been conducted to evaluate our system and algorithm.
- 社団法人 電気学会の論文
- 2009-05-01
著者
-
SUGIYAMA Susumu
Ritsumeikan University
-
Viet Dao
Research Organization For Science And Engineering Ritsumeikan University
-
Sugiyama Susumu
Ritsumeikan-global Innovation Research Organization Ritsumeikan University
-
AMARASINGHE Ranjith
Department of Micro Systems Technology, Ritsumeikan University
-
DAO Dzung
Research Organization for Science and Engineering, Ritsumeikan University
-
Amarasinghe Ranjith
Department Of Micro Systems Technology Ritsumeikan University
-
Sugiyama Susumu
Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
関連論文
- Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure
- A Micromachined Thermal Flow Sensor Applied to A PC Mouse Device
- Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope
- Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure
- Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process
- Development of a Flexible Thermopile Power Generator Utilizing BiTe-Cu Thin Films
- Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light
- Fabrication of Sub-Micron Structures with High Aspect Ratio for Practical MEMS (特集:立体的微細加工)
- Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators for Micro Conveyer Systems
- 特集論文 Inelastic Constitutive Relationship of Electroplated Nickel Films at Elevated Temperatures for Design of Micro Connector (特集:MEMS/NEMS材料特性および信頼性評価)
- Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring
- A Point Mass Circular Movement Gyroscope
- Development of a 3-DOF Micro Accelerometer with Wireless Readout
- Optimization of PZT Diaphragm Pump for the Convective Gyroscope
- A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor
- Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding
- Development of Plastic Injection Molding Using the LIGA Process
- Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist
- Piezoresistive Force Sensor Utilizing Combination of Three-Axis Stress Components
- Characteristics of Polycrystalline Si Nano Wire Piezoresistors
- Design of Micro Multi-Axis Force-Moment Sensor
- Self-standing Polysilicon-metal Thermopile for Micro Power Generator
- A Study on the Sub-Micron LIGA Process
- X-ray Mask with SiC Membrane for LIGA Process
- Shape Prediction of 3-D Microstructures Fabricated by PCT Technique and Synchrotron Radiation Lithography
- Development and Characterization of a Small Ring-Shaped Ultrasonic Probe for Biopsies
- Electrochemical Selective Detection of Uric Acid Using a Copper-modified Carbon Electrode
- Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity
- Shape-prediction of 3D PTFE Microstructures Fabricated by Synchrotron Radiation Ablation
- Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity
- First-Principles Simulation on Piezoresistivity in Alpha and Beta Silicon Carbide Nanosheets
- First-Principles Simulation on Orientation Dependence of Piezoresistance Properties in Silicon Nanowires
- Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump
- First-Principles Simulation on Thickness Dependence of Piezoresistance Effect in Silicon Nanosheets