Formation and Control of Stoichiometric Hafnium Nitride Thin Films by Direct Sputtering of Hafnium Nitride Target

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-07-01

著者

• TSUJI Hiroshi

  Department of Electronic Science and Engineering, Kyoto University

• GOTOH Yasuhito

  Department of Electronic Science and Engineering, Kyoto University

• ISHIKAWA Junzo

  Department of Electronics and Information Engineering, Chubu University

• Gotoh Y

  Tsukuba Univ. Ibaraki Jpn

• LIAO Mei

  Jon Beam Engineering Experimental Laboratory, Kyoto University

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