Plasma Electron Energy Distribution of a Beam-Plasma Type Ion Source
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概要
- 論文の詳細を見る
The plasma electron energy distributions of a beam-plasma type ion source are experimentally investigated in relation to the ion source operational parameters. These parameters are the primary electron beam current (beam-plasma discharge current) and the pressure of the working gas. Using the experimental results, we show that the beam-plasma discharge is an effective method of heating a plasma, with the plasma electrons being distributed in the range of a few eV to a few tens eV. As a result, a plasma is produced with a density of more than 10^<11> particles/cm^3. Beam-plasma type ion sources using the beam-plasma discharge are highly stable and controllable, and can be operated over a wide range of gas pressures and primary electron beam currents.
- 社団法人応用物理学会の論文
- 1983-02-20
著者
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ISHIKAWA Junzo
Department of Electronics and Information Engineering, Chubu University
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Ishikawa Junzo
Department Of Electronics Kyoto University
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Takagi Toshinori
Department Of Electronics Kyoto University
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Motamed Ektessabi
Department Of Electronics Kyoto University
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Ishikawa Junzo
Department of Electronic Science and Engineering, Kyoto University,
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TAKAGI Toshinori
Department of Electronics, Kyoto University
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