Beam-Plasma Type Metal Ion Source

概要

論文の詳細を見る
A metal ion source, whose operation is based on a beam-plasma type ion source, has been developed. Heating of a plasma production chamber (1160℃) and generation of axial magnetic field (0.029 T) were both achieved by DC current flow through a solenoid filament. A continuous ion current of 2-3 mA (Ag, Al, Sb, Mn, Pb) was extracted from a single aperture at a low extraction voltage of 5.2 kV; this was due to a high density plasma production by means of beam-plasma discharge and an ion extraction with ion space-charge compensation by beam electrons and high energy plasma electrons. For the case of silver ton beam, a silver ton current with a purity of 99.5% was extracted without a mass analyzer. Normalized emittance and normalized brightness were 1.9×10^<-8> m・rad and 1.1×10^<11>A・rad^<-2>・m^<-2>, respectively.
社団法人応用物理学会の論文
1983-03-20