Yield Measurement of Secondary Electrons Emitted from Silicon Dioxide Film in Negative-Ion Bombardment

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1996-09-01

著者

• TSUJI Hiroshi

  Department of Electronic Science and Engineering, Kyoto University

• GOTOH Yasuhito

  Department of Electronic Science and Engineering, Kyoto University

• ISHIKAWA Junzo

  Department of Electronics and Information Engineering, Chubu University

• Gotoh Y

  Tsukuba Univ. Ibaraki Jpn

• TOYOTA Yoshitaka

  Department of Communication Network Engineering, Okayama University

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