Film Growth of GaN on a c-Axis Oriented ZnO Film Using Reactive Ionized-Cluster Beam Technique and Its Application to Thin Film Devices : C-4: THIN FILM DEVICES
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1983-02-28
著者
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Takagi Toshinori
Department Of Electronics Kyoto University
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Matsubara Kakuei
Department Of Electrical And Electronic Engineering Faculty Of Engineering Yamaguchi University
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Matsubara Kakuei
Department Of Electronics Kyoto University
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- Film Growth of GaN on a c-Axis Oriented ZnO Film Using Reactive Ionized-Cluster Beam Technique and Its Application to Thin Film Devices : C-4: THIN FILM DEVICES
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