Properties of "Stoichiometric" Silicon Oxynitride Films
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概要
- 論文の詳細を見る
- 1996-02-01
著者
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Inokuma T
Department Of Electronics Faculty Of Technology Kanazawa University
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Inokuma Takao
Department Of Electronics Kanazawa University
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HASEGAWA Seiichi
Department of Electronics, Faculty of Technology, Kanazawa University
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HE Le-Nian
Department of Electrical & Computer Engineering, Faculty of Engineering, Kanazawa University
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