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Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And | 論文
- 高空孔率(50%)高強度(9GPa)自己組織化ポーラスシリカ膜を用いた32nmノードLSI向け超低誘電率膜(k=2.1)Cuダマシン多層配線(配線・実装技術と関連材料技術)
- A New Plasma-Enhanced Co-Polymerization (PCP) Technology for Reinforcing Mechanical Properties of Organic Silica Low-k/Cu Interconnects on 300 mm Wafers(低誘電率層間膜,配線材料及び一般)
- 自己集合体化技術を用いた超低誘電率多孔質シリカ膜(低誘電率層間膜,配線材料及び一般)
- Ultra low-k 膜対応のCMP技術
- CT-1-7 無線インタコネクトと3次元集積(CT-1.Si集積回路配線の解析と設計,エレクトロニクス2)
- Low-k/Cu技術の現状と将来動向(High Speed and Optoelectronic Technology II, 先端デバイスの基礎と応用に関するアジアワークショップ(AWAD2005))
- ポーラスシリカの低誘電率絶縁膜への応用
- ハイパーブレイン実現を目指した無線インタコネクションを用いた三次元集積技術(VLSI一般(ISSCC2005特集))
- Transmission Characteristics of Gaussian Monocycle Pulses for Inter-Chip Wireless Interconnections Using Integrated Antennas
- VLSIチップ内・チップ間無線インタコネクト(回路技術(一般,超高速・低電力・高機能を目指した新アーキテクチャ))
- Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
- Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique
- Selective Growth of Monoatomic Cu Rows at Step Edges on Si(111) Substrates in Ultralow-Dissolved-Oxygen Water
- Effect of Phosphorus Atom in Self-Assembled Monolayer as a Drift Barrier for Advanced Copper Interconnects
- An Evolvable Hardware Chip for a Prosthetic-Hand Controller : New Reconfigurable Hardware Paradigm
- Influences of Skeletal Structure and Porosity on Dielectric and Mechanical Properties of Porous Organosilica Low-k Films
- Determination of mechanical properties of porous silica low-k films on Si substrates using orientation dependence of surface acoustic wave
- Nondestructive characterization of dielectric stack structures by laser-pulse-generated surface acoustic wave analysis
- The structural origin of determining the coefficient of thermal expansion for porous silica low-k films
- Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy