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Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And | 論文
- Infrared Complex Dielectric Function Analysis for Chemical Bonding Structure of Porous Silica Low Dielectric Constant Films
- Adsorption in-situ Spectroscopic Ellipsometry Analysis of Disordered Porous Silica Low-k Films
- Comparison of Pore Shape Models for Small Angle X-ray Scattering of a Disordered Porous Silica Low-k Film
- Electrical Characteristics of Porous Zeolite Interlayer Dielectrics
- Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry
- Low-k/Cu技術の現状と将来動向(High Speed and Optoelectronic Technology II, 先端デバイスの基礎と応用に関するアジアワークショップ(AWAD2005))
- Dopant-atom distribution measurement at p-n junctions on wet-prepared Si(111):H surfaces by scanning tunneling microscopy
- Scanning Tunneling Microscopy Observation of Individual Boron Dopant Atoms beneath Si(001)-2×1 Surfaces
- Effects of Silylation on Electrical and Mechanical Characteristics of Mesoporous Pure Silica Zeolite Films
- Electrical Characteristics of Mesoporous Pure-Silica–Zeolite Film
- Formation of Mesoporous Pure Silica Zeolite Film
- Two Dimensional Dopant Profiling by Scanning Tunneling Microscopy
- Young’s Modulus Enhancement of Mesoporous Pure-Silica–Zeolite Low-Dielectric-Constant Films by Ultraviolet and Silylation Treatments
- Determination of Mechanical Properties of Porous Silica Low-$k$ Films on Si Substrates Using Orientation Dependence of Surface Acoustic Wave
- Selective Growth of Monoatomic Cu Rows at Step Edges on Si(111) Substrates in Ultralow-Dissolved-Oxygen Water