Accelerating Effect of Aluminum Oxide Films on Surface Acoustic Wave on Cystalline Quartz

概要

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Aluminum oxide (Al2O3) films have been successfully deposited on stable temperature (ST)-cut quartz substrates by electron beam evaporation without any interlayer to ensure a good adhesion of the Al2O3 films to the quartz substrates. The Al2O3 thin films increase the surface acoustic wave (SAW) velocity sufficiently, and can be used to improve the performance of SAW devices. Both the theoretical and experimental results show that the SAW phase velocity in the Al2O3/quartz structure was increased with the insertion of an Al2O3 film. The increase in SAW velocity with increasing thickness of the Al2O3 film results from the stiffening effect of the Al2O3 layer. The velocity change ratio predicted by the theoretical analysis of the Al2O3 (1.45 μm)/quartz sample was about 4.38% which is slightly larger than the experimental result of 3.28%. These results are better than those published in the literature for a diamond-like carbon/SiC buffer layer/quartz structure with a velocity change ratio of 2.3%.
2009-07-25