3Pb3-9 フレネルレンズおよび圧電トランスジューサの特性に及ぼす製作プロセスの影響について(ポスターセッション)
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概要
- 論文の詳細を見る
A two-mask fabrication process of a four-level Fresnel lens was used to evaluate its characteristics through investigating the effect of SU-8 photoresist (PR) on the profile of the focusing lens. A two-step deposition of ZnO films was applied to fabricate a piezoelectric transducer with the structure Al/ZnO/Pt/Ti/SiO_2/Si under reasonable conditions.
- 2011-11-08
著者
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Bui Tuan-anh
Department Of Mechanical Engineering National Central Univ.
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Pan Min-chun
Department Of Mechanical Engineering National Central Univ.
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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