3P-23 ZnO/A1_2O_3/Glassを用いたSAW素子の特性(ポスターセッション)
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概要
- 論文の詳細を見る
ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on Al_2O_3/glass substrates. The alumina films were deposited on glass substrates by electron beam evaporation. The phase velocity, coupling coefficient and temperature coefficient of frequency (TCF) of SAW device were increased when we increased the thickness of alumina film. The experimental result is beneficial to upgrade the performance of the ZnO thin film SAW devices on cheap glass substrate.
- 2010-12-06
著者
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Peng Yan-kai
Graduate Institute In Electro-optical Engineering Tatung University
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Shih Wen-Ching
Graduate Institute in Electro-Optical Engineering, Tatung University
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Wang Tzyy-Long
Graduate Institute in Electro-Optical Engineering, Tatung University
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung University
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Wang Tzyy-long
Graduate Institute In Electro-optical Engineering Tatung University
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