1P5-12 水晶基板上のSAWに対する酸化アルミニウムによる速度上昇(ポスターセッション)
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概要
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Aluminum oxide (Al_2O_3) films have been successfully deposited on ST-cut quartz substrates by electron beam evaporation without any interlayer between them to ensure a good adhesion of the Al_2O_3 films to quartz substrates The Al_2O_3 thin films increase the surface acoustic wave (SAW) velocity sufficiently, and they can be used for improvement of the performance of the SAW devices. The effect of accelerating SAW by the Al_2O_3 thin films has been measured and discussed. The results show that SAW phase velocity in the Al_2O_3/quartz structure increases with inserting an Al_2O_3 film. It is observed that the 1.45μm thick Al_2O_3 film is able to speed up SAW by 3.28% at 271 MHz for Al_2O_3/quartz sample.
- 2008-11-11
著者
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Shih Wen-Ching
Graduate Institute in Electro-Optical Engineering, Tatung University
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Wang Tzyy-Long
Graduate Institute in Electro-Optical Engineering, Tatung University
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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Wang Tzyy-long
Graduate Institute In Electro-optical Engineering Tatung University
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Shih Wen-ching
Graduate Program In Electro-optical Engineering Tatung University
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Wang Tzyy-long
Graduate Program In Electro-optical Engineering Tatung University
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Kuo Yi-ling
Graduate Program In Electro-optical Engineering Tatung University
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Kuo Yi-Ling
Graduate Institute in Electro-Optical Engineering, Tatung University, No. 40, Sec. 3, Chungshan North Road, Taipei 104, Taiwan, R.O.C.
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