2Pb3-3 ZnO薄膜/ガラス基板上のSAWデバイス特性におけるアルミナ膜の効果(ポスターセッション)
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概要
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ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on interdigital transducers (IDTs)/Al_2O_3/glass substrates. The alumina films were deposited on glass substrates by electron beam evaporation. The phase velocity, coupling coefficient and temperature coefficient of frequency (TCF) of SAW device were increased when we increased the thickness of alumina film. The experimental result is beneficial to upgrade the performance of the ZnO thin film SAW devices on cheap glass substrate.
- 2011-11-08
著者
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Shih Wen-Ching
Graduate Institute in Electro-Optical Engineering, Tatung University
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Shih Wen‐ching
Tatung Univ.
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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Wang Tzyy-long
Graduate Institute In Electro-optical Engineering Tatung University
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Chang Chia-chi
Graduate Institute In Electro-optical Engineering Tatung University
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Wu Mu-shiang
Graduate Institute In Electro-optical Engineering Tatung University
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