3P-32 C軸配向ZnO膜を用いた集束超音波放出器の作製(ポスターセッション)
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概要
- 論文の詳細を見る
Four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. Highly c-axis textured ZnO films were successfully deposited on Pt (annealed)/Ti/SiO_2/Si substrate under feasible conditions. These conditions were to be applied and confirmed through investigating the influences of RF sputtering parameters on the properties of ZnO films.
- 超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
- 2010-12-06
著者
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Shih Wen-Ching
Graduate Institute in Electro-Optical Engineering, Tatung University
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Bui Tuan-anh
Department Of Mechanical Engineering National Central Univ.
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Pan Min-Chun
Department of Mechanical Engineering, National Central Univ.
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Nien Yu-Chuan
Department of Mechanical Engineering, National Central Univ.
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Pan Min-chun
Department Of Mechanical Engineering National Central Univ.
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Nien Yu-chuan
Department Of Mechanical Engineering National Central Univ.
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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