3PB3-2 SAWデバイス特性改善を目的としたEB蒸着によるZnO/ガラス基板上へのアルミナ堆積(ポスターセッション)
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概要
- 論文の詳細を見る
ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on glass substrates. The alumina films were deposited on interdigital transducers/ZnO/glass substrates by electron beam evaporation. The phase velocity, and coupling coefficient of surface acoustic wave (SAW) device were increased when we increased the thickness of alumina film. The experimental result is beneficial to upgrade the performance of the ZnO thin film SAW devices on cheap glass substrate.
- 2012-11-13
著者
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Shih Wen-Ching
Graduate Institute in Electro-Optical Engineering, Tatung University
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Shih Wen-ching
Graduate Institute In Electro-optical Engineering Tatung Univ.
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Wu Mu-shiang
Graduate Institute In Electro-optical Engineering Tatung University
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Lu Chih-Hsuan
Graduate Institute in Electro-Optical Engineering, Tatung University
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