Organic Field-Effect Transistors with Gate Dielectric Films of Poly-$p$-Xylylene Derivatives Prepared by Chemical Vapor Deposition

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We have fabricated organic field-effect transistors (OFETs) using various dielectric films of poly-$p$-xylylene derivatives to investigate the correlation of field-effect mobility and the surface properties of the dielectric films under constant conditions of fabrication process and molecular backbone. The OFET using pentacene as the semiconductor and poly-chloro-$p$-xylylene as the dielectric film showed good performance for an OFET using a polymer dielectric film; the field-effect mobility was 0.81 cm2/Vs and the on/off current ratio was $1.4\times 10^{6}$. We observed an obvious tendency for the hydrophobic dielectric layers to give a higher field-effect mobility for both crystalline organic semiconductors and amorphous polymer semiconductor, though a significant correlation of field-effect mobility with the dielectric constant and surface roughness of the dielectric films was not observed.
2003-10-15