Carrier Mobility of Pyrolyzed Polyimide Films
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概要
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The carrier mobility of pyrolyzed polyimide films was estimated by the time-of-flight technique. The carrier mobility could be estimated for the polyimides pyrolyzed between 480 and 530℃, which possessed conductivities between 10^<-12> and 10^<-8>S cm^<-1> and mobilities ranging from 10^<-7> to 10^<-3>cm^2V^<-1>s^<-1>. The number of carriers connected with charge transport remained unchanged even when the pyrolysis temperature was varied from 490 to 530℃, as the conductivity was proportional to the mobility. In polymides pyrolyzed at lower temperatures, below 490℃, a deviation from theclose relation between the mobility and the conductivity was observed. These results suggest that the carrier density increases at the initial stage of the pyrolysis, and then the increase of the mobility becomes predominant as the pyrolysis progresses.
- 社団法人応用物理学会の論文
- 1985-08-20
著者
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Hara Takeo
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
-
Saito Shogo
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
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Tsutsui Tetsuo
Department Of Applied Science For Electronic And Materials Graduate School Of Engineering Sciences K
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Tsutsui Tetsuo
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
-
Saito Shogo
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
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