Preparation of Wide-Gap Hydrogenated Amorphous Silicon Carbide Thin Films by Hot-Wire Chemical Vapor Deposition at a Low Tungsten Temperature
スポンサーリンク
概要
- 論文の詳細を見る
Hydrogenated amorphous silicon carbide (a-Si1-xCx:H) thin films were prepared by hot-wire chemical vapor deposition at a tungsten temperature of 1400°C in methane, silane and hydrogen gas atmosphere, and their properties were investigated. The optical band gap, estimated from Tauc's plot, of a-Si1-xCx:H films prepared at a total gas pressure of 1 Torr was $1.79\pm 0.03$ eV. On the other hand, the optical band gap of a-Si1-xCx:H films prepared at 4 Torr was $2.18 \pm 0.05$ eV. The infrared absorption spectra showed that a-Si1-xCx:H films prepared at 4 Torr have more Si–C bonds than those prepared at 1 Torr. These findings indicate that the preparation at a high total gas pressure can lead to higher carbon content, consequently, wider-gap a-Si1-xCx:H films, even at a low tungsten temperature.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-01-15
著者
-
Nakajima Takayuki
Department Of Applied Chemistry Graduate School Of Science And Engineering Waseda University
-
Suzuoki Yasuo
Center For Integrated Research In Science And Engineering Nagoya University
-
Mizutani Teruyoshi
Department of Electrical and Electronic Engineering, Aichi Institute of Technology, Toyota, Aichi 470-0529, Japan
-
Tabata Akimori
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
-
Tabata Akimori
Department of Electrical Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan
関連論文
- Molecular Structure and Electric Breakdown of Ethylene/Silane Copolymers
- Organic field-effect transistors based on vapor-deposited pentacene and soluble pentacene precursor (第48回真空に関する連合講演会プロシーディングス--2007年11月14日〜16日,東京)
- Optical bistability of Poly(3-octylthiophene)/Polymethylmethacrylate composite waveguides prepared by spin coating (第50回真空に関する連合講演会プロシーディングス)
- Optical bistability of spin coated poly(3-octylthiophene)/polymethylmethacrylate composite waveguides (特集 機能性有機薄膜・複合膜とデバイス応用)
- Morphology and third-order nonlinear optical properties of vanadyl phthalocyanine thin films on preheated KBr substrate (特集 機能性有機薄膜・複合膜とデバイス応用)
- Risk Factors for Hypoxemia After Surgery for Acute Type A Aortic Dissection
- Facile Three-Component Synthesis of Substituted Quinolines Catalyzed by Iridium(III) Complex
- Synthesis of β-Amino Ketones by Iridium(III)-catalyzed Direct-Mannich Reaction
- Short Step Synthesis of Natural 2-Aryl-quinolones Based on Iridium-Catalyzed Three-Component Coupling Quinoline Synthesis
- One-pot Synthesis of Substituted Quinolines by Iridium-catalyzed Three-component Coupling Reaction
- One-Step Synthesis of Ethyl Quinaldates by Lewis Acid Catalyzed Three-Component Coupling Reaction of Aromatic Amines, Aliphatic Aldehydes and Ethyl Glyoxylate
- Influence of Gelatin-Resorcin-Formalin Glue on Mid-Term Redissection After Aortic Repair
- Aortic Root Remodeling With Aortic Annuloplasty : Mid-Term Results
- Transaortic Mitral Valve Repair Combined with a Modified Bentall Procedure in a Patient with Marfan's Syndrome : Report of a Case
- Severe Stenosis of the True Lumen in the Abdominal Aorta After an Ascending Aorta Reconstruction for an Acute Type A Dissection : Report of a Case
- Fluorescence Lifetime of Organic Thin Films Alternately Deposited with Diamine Derivative and Aluminum Quinoline
- Actual Emitting Region in Organic Electroluminescent Diodes with Multilayer Structure
- Electrical and Luminescent Properties of Color-Changeable Organic Electroluminescent Diode Using Squarylium Dyes
- Thermally Stimulated Currents in Photoelectrets of Polyethylene Terephthalate
- Optical bistability of quasi-waveguide of poly(3-octylthiophene)/polymethylmethacrylate composite film (有機エレクトロニクス)
- Performance of Organic Field Effect Transistors with Fluorinated Copper Phthalocyanine as Active Layer and Polymer Dielectric Layer as Gate Insulating Layer
- Performance of organic field effect transistors with fluorinated copper phthalocyanine as active layer and polymer dielectric layer as gate insulating layer (有機エレクトロニクス)
- ESR Centers in Silicon Monoxide
- Annealing Effects of Paramagnetic Defects Introduced near Silicon Surface
- Photoconduction in Polyvinyl Carbazole Thin Films Polymerized by Plasma-CVD
- Transmission Electron Microscopy Observation and Third-Order Optical Nonlinearity of CdSe-Doped Glass Thin Films Prepared by Jon-Beam Sputtering Method
- Properties of the CdSe-Doped Glass Thin Films Prepared by Ion-Beam Sputtering Method
- Study on the Conduction Mechanism of Organic Light-Emitting Diode Using One-Dimensional Discontinuous Model(Special Issue on Recent Progress in Organic Molecular Electronics)
- Analysis of Electoluminescence Mechanisms in N, N'-disphenyl-N, N'-bis(3-methylphenyl)-1, 1'-disphenyl-4, 4'-diamine/Hydroxyquinoline Aluminum Bilayer Organic Light-Emitting Diode by Bipolar Hopping Conduction(Atoms, Molecules, and Chemical Physics)
- Photocarrier Generation and Transport in Polyimide Films : A Numerical Analysis
- Molybdenum-Catalyzed Aromatic Substitution with Olefins and Alcohols
- Temperature Dependence of Photocurrent in Polyethylene
- S-I-9. Indications and Limits of an Extensive External Decompoession
- Influence of Antistatic Agent on Electrical Conduction of Polyethylene
- Surface Potential Decay of Corona-Charged High-Density Polyethylene
- Electron Spin Resonance in Thin Polymer Films Formed in a Glow Discharge
- Anomalous Discharging Current Peak in Unstretched α-Form Polyvinylidene Fluoride
- Photoconduction in Polyimide (Kapton H)
- Effect of Dipoles on Electrical Conduction in Polymers : II. Low-Field Conduction in Polyvinylidene Fluoride
- Dipolar Effect in Thermal-Pulse-Current Responses of Polar Polymers
- Effect of Dipoles on Electrical Conduction in Polymers : I. Numerical Calculation
- Comparative Study on the Electronic Properties of p-Xylene Polymers Prepared by Plasma-Polymerization and Vapor Phase Pyrolysis
- Preparation of Phenylacetylene Polymer Thin Films by Photochemical Polymerization
- A Study on Carrier Traps in Plasma-Polymerized Phenylacetylene
- Electrical Conduction of Poly-P-Xylylene Thin Films on Si
- Electrical Properties of High-Molecular-Weight Poly-p-Phenylene Sulfide Films. : I. Photoconduction
- Effects of Polar Groups on Electrical Conduction in Polyethylene
- Thermally Deactivated-Type High Field Conduction in Poly-p-Xylylene Thin Films Polymerized in Vapor Phase
- Photogeneration of Charge Carriers in Polyimide Films
- TSC Study on Interfacial Phenomena in PE (Polyethylene)-EVA (Ethylene-Vinylacetate Copolymer) Laminated Films
- Determination of Trapping Parameters from TSC in Polyethylene
- X-Ray Induced Current Transients in α-Form Polyvinylidene Fluoride
- Preparation of Wide-Gap Hydrogenated Amorphous Silicon Carbide Thin Films by Hot-Wire Chemical Vapor Deposition at a Low Tungsten Temperature
- Effects of Oxidation on Electrical Conduction and Breakdown of Low-Density Polyethylene Films with Different Densities
- Oxidation-Enhanced TSC and TSSP of Polyethylene
- Influence of Chemical Structure on Electrical Conductionin Insulating Polymers
- Anomalous Discharging Currents due to Space Charge
- Anomalous transient Currents in High-Density Polyethylene around 50-70℃
- Surface Potential Decay in Polyethylene
- ESR Study on Surface Properties of Semiconductor. : II. III-V Compounds (GaAs, GaSb and InSb)
- Performance of Organic Field-Effect Transistors with Poly(3-hexylthiophene) as the Semiconductor Layer and Poly(4-vinylphenol) Thin Film Untreated and Treated by Hexamethyldisilazane as the Gate Insulator
- Effect of Plaslma Off Time on the Structure and Electrical Properties of Hydrogenated Amorphous Silicon Carbide Films Prepared by Pulse-Modulated Plasma Deposition : Semiconductors
- Phosphine-dependent Stereoselective Nucleophilic Reaction to Bicyclic Bis-μ-dichloro-η^3-allylpalladium Complexes
- Enantioselecitve Elimination of Pd-H from η^3-Allylpalladium-Tol BINAP Complexes. Evidence of Syn Elimination Pathway
- Effect of Blending on Electrical Conduction and Breakdown of Low-Density Polyethlene Films with Different Densities
- A Study on the Mechanism of PD in Electrical Trees by Observing the Light Emission from PD Pulses
- Investigation of Space Charge in High-Density Polyethylene Using Thermal-Pulse Response
- X-Ray Induced Currents in Polyvinylidene Fluoride
- X-Ray-Induced Thermally-Stimulated Currents in Polyvinylidene Fluoride
- Field Dependence of Thermally Stimulated Currents from High-Density Polyethylene
- Investigation of Carrier Traps in Polyethylene by PSDC and TSC
- Thermoluminescence in High Density Polyethylene and Its Oxidation Effects
- Influence of Oxidation on Thermoluminescence from Polyethylene
- Electron-Beam Induced Conduction in Some Polymers
- Thermally Stimulated Currents from Carriers Trapped in Polyethylene
- Carrier Traps in Poly-p-Xylylene Thin Films
- Carrier Traps in Poly-p-Xylylene Films
- High Field Conduction in Poly (p-xylylene) Thin Films
- Photoluminescence Study in Polymers
- Study on Electron Traps in Polyethylene Terephthalate by Thermally Stimulated Current and Photo-Stimulated Detrapping Current Analyses
- Photoconduction in Polyethylene Terephthalate. Mechanism of Photo-Carrier Transport.
- Investigation of Traps in γ-Irradiated Polyethylene by Photostimulated Detrapping Current Analysis
- Photodetrapping Currents in γ-Irradiated Polyethylene
- Aortic Root Reimplantation Using a Valsalva Graft for Postoperative Pseudoaneurysm after Acute Aortic Dissection
- Electroluminescent Properties in Organic Light-Emitting Diode Doped with Two Guest Dyes : Optical Propertles of Condensed Matter
- Influence of Poling Field on Polymerization in Polyurea Thin Films for Second-Harmonic Generation Prepared by Vapor Deposition Polymerization
- Influence of Preparation Conditions on Decay of Second-Harmonic Generation in Polyurea Thin Films Prepared by Vapor Deposition Polymerization
- Atmospheric Effects on Photoinjection Currents into Polyethylene Terephthalate
- Effects of Electrode Materials on Photocurrents in Polyethylene Terephthalate
- Bentall Operation with Saphenous Vein Graft for a Takayasu's Aortitis Patient
- Study on Relationship between Electroluminescence Properties and Molecular Weight Distribution of Poly(9,9$'$-dioctylfluorene) Using Photoluminescence
- Deposition Process and Morphology of Metal–Phthalocyanine Thin Film Evaluated by Analyzing the Ultraviolet–Visible Spectrum and X-ray Diffraction Profile
- Inter-observer and intra-observer reliabilities of the Japanese Ministry of Health, Labor and Welfare type classification system for osteonecrosis of the femoral head
- Performance of Organic Field-Effect Transistor Based on Poly(3-hexylthiophene) as a Semiconductor and Titanium Dioxide Gate Dielectrics by the Solution Process
- Orientation Control of Vanadylphthalocyanine Molecules Deposited on Pt (111) and Au (111) Surfaces
- Organic Field-Effect Transistors with Crosslinkable Poly(vinyl alcohol) Insulator and Spin-Coated/Drop-Cast Poly(3-hexylthiophene-2,5-diyl) Semiconductor
- Optical Bistability of Terthiophene/Poly(methyl methacrylate) Composite Film Prepared Using Spin-Coating
- Morphology, Desorption Energy and Mean Residence Time of Vanadyl-Phthalocyanine Molecules Deposited on Two Kinds of Substrates by Molecular Beam Epitaxy
- Experimental study on effective application of fibrin glue
- Preparation of Wide-Gap Hydrogenated Amorphous Silicon Carbide Thin Films by Hot-Wire Chemical Vapor Deposition at a Low Tungsten Temperature