微小物体を対象とした非接触超音波支持の作用力特性:—第1報　作用力測定機構の製作及び作用力特性の取得—

概要

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In near-field levitation, an object can be levitated vertically upward above vibrating surface of an ultrasonic transducer. On the other hand, it has been reported that an object can be suspended vertically downward under the vibrating surface in the air. We call this phenomenon ultrasonic suspension. When an object is suspended, there is restoring force, which attracts the object to the center of the vibrating surface. Characteristics of the forces acting vertically and horizontally were investigated experimentally. A servo type measuring mechanism was composed and could measure vertical and horizontal actuation forces simultaneously. This paper reports the relationship among the actuation forces, suspension gap and center distance between vibrating surface and suspended object. As a result, it has been found that the actuation forces change with the vibrating amplitude, the diameter of vibrating surface, the diameter of circular plate and so on.