S116014 中性子反射率法によるフェムト秒レーザ加工DLC膜の構造解析とそのトライボロジー特性([S11601]トライボロジーにおける実験・計測・解析手法の新展開)

概要

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Neutron reflectometry is powerful method to analyze the structure such as density, thickness and roughness of thin film. In this paper, two hydrogenated Diamond-like carbon (DLC) films were prepared on ultra-flat silicon block by plasma-enhanced chemical vapor deposition, and one DLC film was processed (processed DLC film) by femtosecond laser at low laser fuluence. We analyzed each target surface using neutron reflectometer 'MINE' in Japan Atomic Energy Agency, and investigated processing effect on the structural of DLC film. As a result, processed DLC film showed low density and thick film compared with unprocessed DLC film. Moreover, we evaluated friction properties of the DLC using a block-on-ring type sliding tester under lubrication. Friction coefficient of processed DLC film showed low initial value and short running-in process compared with unprocessed DLC film. It is thought that the result can be attributed to that a structural change to graphite-like structure by femtosecond laser processing.
一般社団法人日本機械学会の論文
2011-09-11