マイクロスラリージェット***ージョン(MSE)試験によるDLC膜の摩耗特性評価(機械要素,潤滑,工作,生産管理など)

概要

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DLC (Diamond-Like Carbon) films are used in various fields because of their low coefficient of friction and their high wear resistance. Although there are many evaluation techniques for the surface strength of DLC films, those are not sufficiently established now. Regarding this background, we have proposed a new type of solid particle impact (micro slurry-jet erosion: MSE) test to swiftly evaluate the wear properties of thin hard coatings. In the present study, we evaluated the wear rate of DLC films deposited by the unbalanced magnetron sputtering method under different bias voltages (0V, -50V, -100V, -150V). The wear rate (μm/min) decreased with increasing bias voltage. Atomic force microscope (AFM) images of the worn surfaces showed that the surface roughness became smaller with higher bias voltage. From these results, we conclude that the wear debris become smaller in size and the number of detached particles decreases with increasing bias voltage. Thus, the high wear resistance of DLC films is related with their high hardness. Furthermore, our method can be recommended as a screening test when evaluating DLC films.
2009-01-25