磁場フィルター型AIP法で形成したステンレス鋼窒化膜の構造および機械的特性

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Nitrogen-containing stainless steel coatings were synthesized from different stainless steel targets (SUS 304, 310 S) by a cathodic arc-ion plating process, using two types of arc-cathode, namely, conventional and magnetically filtered cathodes. The effects of the cathode type, target material and process parameter on the structural, compositional and mechanical properties of coatings were investigated. From X-ray diffraction analysis, coatings deposited by a magnetically filtered cathode showed a new crystal structure, which could be identified as a cubic type zinc-blend or rock-salt structure, whereas the coating deposited by the conventional cathode was a mixture of nitrogen supersaturated fct (face centered tetragonal) type gamma Fe-N phase and Fe3N. The relationship between nitrogen partial pressure (PN2) and nitrogen content in the coating showed quite different behavior depending on the cathode type used. For the conventional cathode, the nitrogen content increased gradually as the PN2 increased from 0.8 to 2.7 Pa and reached approximately 30mol% at the highest PN2. However, using a magnetically filtered cathode, the nitrogen content was about 40 to 50 mol%, at a pressure range of 0.7 to 1.0 Pa. The change in the crystal structure, depending on the cathode type, was considered to be primarily due to the difference of the nitrogen content in the coatings. It was concluded that using the magnetically filtered cathode, ionization of the gaseous species in the process chamber could be enhanced due to the longer electron path from the cathode to the anode, resulting in enhanced reactivity of nitrogen with metallic elements.
一般社団法人表面技術協会の論文
2004-03-01

磁場フィルター型AIP法で形成したステンレス鋼窒化膜の構造および機械的特性

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