1012 水素化DLC膜の水環境摺動特性に及ぼす皮膜硬度の影響(基調講演,関東支部 茨城講演会)
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概要
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Hydrogenated DLC coatings with different hardnesses were deposited on SUS630 disks by a multi-cathode UBMS (unbalanced magnetron sputtering system). Tribological properties of hydrogenated DLC coatings against SUS630 and brass in distilled water have been investigated using a ball-on-disk tribometer. Specific wear rate of DLC coatings and ball have a trade-off relationship, and that specific wear rate of DLC coatings decreased as the DLC hardness increased. Cross-sectional TEM analysis showed that a transfer layer mainly composed of Fe, O and C was formed on the ball after sliding test. The transfer layer have an influence of the tribological properties of hydrogenated DLC coatings.
- 2005-09-08
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