G1301-1-3 マイクロ流体チップ金型の微細溝加工の研究 : 切れ刃丸み半径の影響(生産加工・工作機械一般)

概要

論文の詳細を見る
The micro-channel chip (micro total analysis system) attracts attention in the medical field. Generally, the photo lithography technology used in a semiconductor manufacture process is used as the manufacture method of a micro-channel chip die. However, there are many manufacturing processes like fabrication of a mask, the photo-resist application to a substrate, expensive facility of a clean room etc. So, this study examined how to form a fine groove by cutting with a micro end mill. This report examined experimentally the processing conditions which should be developed. As a result, the cutting edge roundness of a micro end mill and the cutting performance, such as burr generating, were clarified.
社団法人日本機械学会の論文
2009-09-12