G1300-1-2 マイクロ流体チップ金型の微細溝加工の研究 : マイクロ工具の加工条件の選定指針([G1300-1]生産加工・工作機械部門一般講演)

概要

論文の詳細を見る
The micro-channel chip (micro total analysis system) attracts attention in the medical field. Generally, the photo lithography technology used in a semiconductor manufacture process is used as the manufacture method of a micro-channel chip die. However, there are many manufacturing processes like fabrication of a mask, the photo-resist application to a substrate, expensive facility of a clean room etc. So, this study examined how to form a fine groove by cutting with a micro endmill. This report examined experimentally the processing conditions which should be developed. As a result, we created the selection guideline of cutting conditions in which burr could be reduced.
一般社団法人日本機械学会の論文
2010-09-04