微細表面制御DLC膜のナノスケール摩擦特性(J23-1 マイクロナノ理工学(1),J23 マイクロナノ理工学)

概要

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It is known that the optimum surface roughness is capable of reducing lateral force. In this paper, the frictional properties of the diamond-like carbon (DLC) films with the periodic structures were investigated in nano-scale using a scanning probe microscope (SPM). DLC films were prepared by an unbalanced magnetron sputtering method. The periodic structures have been generated on the surface of DLC films by polarized femtosecond laser (τ=40fs, λ=800nm, F=10Hz) of energies nearby ablasion threshold. The influence of normal load and relative humidity on the lateral forces were confirmed by the SPM. We used a silicon nitride rectangular cantilever with sharpened pyramidal tip or a sperical glass tip. Using the sharpened pyramidal tip, the lateral force of the DLC film with the periodic structures was higher than that of the film without the periodic structures. On the other hand, the lateral force of the DLC film with the periodic structures was lower than that of the film without the periodic structures using a sperical glass tip at low normal load and low relative humidity.
2004-09-04