薄膜の表面強度評価法(MSE法)の開発(基調講演1)

概要

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Several different experimental techniques are normally used to evaluate tribological properties of hard thin coatings. However, most of the tests cannot assess properties of coating, substrate and interface independently. Versatile and reliable techniques for evaluation of hard thin coatings are necessary for the development and tribological assessment of new coatings. We have proposed a new type of micro slurry-jet erosion test (MSE), i.e. a solid particle impact erosion test for swift evaluation of surface strength properties of hard thin coatings. We are using new type of MSE test apparatuses, which in the tests were impacted by alumina particles with 1.2 μm in average size. Their performances were evaluated using TiN, TiC/TiN coatings and DLC films. The new MSE test is able to assess the surface strength properties of thin coatings independently from the properties of the substrate, and generate highly reproducible results.
一般社団法人日本機械学会の論文
2010-04-18