2102 原子間力顕微鏡によるDLC膜の固体粒子衝突摩耗の解析(薄膜・解析手法,一般講演)

概要

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Sequential observations of worn surface are effective in understanding wear mechanisms. Usual sequential observations have been carried out using a scanning electron microscope or an optical microscope. Since it is difficult to observe nano-scale deformations in the micro-particle impact erosion process, we have conducted successive observation of the erosion process of DLC films with an atomic force microscope (AFM). In the present study, DLC films were deposited on high speed steel substrate under bias voltage 0V(DLC-0V) and -150V(DLC-150V) by PVD. The impact wear resistance of DLC-150V was approximately 240 times higher than that of DLC-0V. The AFM sequential observations showed that rupture dimensions and frequency are significantly different between DLC-0V and DLC-150V. Consequently, the difference in impact wear resistance of DLC films is attributed to the differences of rupture dimensions and frequency at the nano-scale.
一般社団法人日本機械学会の論文
2008-04-20