1203 マイクロラバーファブリケーションによる立体構造を有するマイクロチェックバルブの試作研究(アクチュエータとその応用,一般講演)

概要

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In recent years, expectation to the realization of micro fluid systems and devices has been increasing. One of the devices, micro check valve is an important device for practical application of the systems. In this research, micro check valves having steric microstructure were developed with micro rubber fabrication. The micro rubber fabrication is a process integrating a finite element method (FEM) analysis, the precise die using a fine NC milling machine, a silicone rubber molding, and an excimer laser junction. Thus far, most kind of micro check valves have planer configuration. Having steric microstructure, however, the developed valves have higher performance than common flat type valves and working as check valve without the structure in the surrounding. To clarify the performances of developed valves, static and dynamic pressure-flow characteristics and the response characteristics in the flow changing periodically flow directions are tested.
2010-04-18