1P1-C04 新規微細加工法"MeME"による薄膜マイクロ流路デバイスの実現

概要

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In this report, we have developed a fabrication process named "Membrane Micro Embossing (MeME)" to realize a three-dimensional micro fluidic device made of thin polymer membrane. This process uses a) a master mold, b) a support substrate and c) a thermoplastic polymer membrane. By pressing the master mold at glass transition temperature of the polymer, the membrane set between the master mold and the support substrate is deformed to fit the surface of the master mold by the backpressure from the plastic support substrate. Micro structures made of thin membrane can be obtained after selective dissolution of the support substrate. Here, we have succeeded in fabricating highly branched polymer microchannels with width of 50μm, depth of 50μm, and membrane thickness of 5μm. This membrane microfluidic device can improve heat and mass transfer between the inside and the outside of the channel compared to conventional microfluidic devices made of thick substrate.
一般社団法人日本機械学会の論文