424 光位相制御素子「水平駆動MEMSミラー」の開発(T09-1 微小機械システムにおけるマイクロ・ナノ力学(1) MEMSにおけるマイクロ・ナノ力学,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
Laser technology is one of best activity fields in recent years, and optical phase modulation is important technology for expanding laser application. It is required to develop a reflecting mirror unit in order to modulate the phase of high power laser. In this paper, we developed translation mirror device for optical phase modulation. The device was manufacture by MEMS process at 1mm pitch. It has double-layer springs for high rigidity of rotating. In the result the mirror tilt is 0.03mrad at 5μm translation, so it was able to modulate the laser phase with excellent precision.
一般社団法人日本機械学会の論文
2008-08-02