Preparation of Ag-Alloy Top-Electrode for Ferroelectric Pb(Zr, Ti)O_3 Films under Various Atmospheres
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概要
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An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr, Ti)O_3 (PZT) films. The effect of annealing temperature on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H_2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300℃. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300℃. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400℃. The ferroelectricity of PZT film was maintained even after annealing at 350℃ using the Ag-alloy electrode.
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Kojima Atsushi
Institute For Materials Research Tohoku University
-
Goto Takashi
Institute For Material Research Tohoku University
-
Iijima Takashi
Smart Structure Research Center Aist
-
Masumoto Hiroshi
Institute For Materials Research Tohoku University
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Iijima Takashi
Smart Structure Research Center; Aist
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Masumoto Hiroshi
Institut Fur Physiologische Chemie I Heinrich-heine-universitat Dusseldorf
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